0	1	null	null
0	2	null	null
0	3	null	null
0	4	null	null
0	5	null	null
0	6	null	null
0	7	null	null
0	8	null	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong
0	9	null	null
0	10	null	null
0	11	null	null
0	12	null	Hong Kong University of Science and Technology
0	13	null	Hong Kong University of Science and Technology
0	14	null	Hong Kong University of Science and Technology
0	15	null	null
0	16	null	School of Business, Sun Yat-Sen University, Guangzhou, China
0	17	null	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China
0	18	null	null
0	19	null	null
0	20	null	null
0	21	null	null
0	22	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
0	23	null	null
0	24	null	null
0	25	null	null
0	26	null	Motorola, Inc.
0	27	null	null
0	28	null	null
0	29	null	null
0	30	null	null
0	31	null	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
0	32	null	null
0	33	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
0	34	null	null
0	35	null	null
0	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
0	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
0	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
0	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
0	40	null	null
0	41	null	null
0	42	null	null
0	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
0	44	null	null
0	45	null	null
0	46	null	null
0	47	null	null
0	48	null	null
0	49	null	null
0	50	null	null
0	51	null	null
0	52	null	null
0	53	null	null
0	54	null	null
0	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
1	2	null	null
1	3	null	null
1	4	null	null
1	5	null	null
1	6	null	null
1	7	null	null
1	8	null	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong
1	9	null	null
1	10	null	null
1	11	null	null
1	12	null	Hong Kong University of Science and Technology
1	13	null	Hong Kong University of Science and Technology
1	14	null	Hong Kong University of Science and Technology
1	15	null	null
1	16	null	School of Business, Sun Yat-Sen University, Guangzhou, China
1	17	null	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China
1	18	null	null
1	19	null	null
1	20	null	null
1	21	null	null
1	22	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
1	23	null	null
1	24	null	null
1	25	null	null
1	26	null	Motorola, Inc.
1	27	null	null
1	28	null	null
1	29	null	null
1	30	null	null
1	31	null	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
1	32	null	null
1	33	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
1	34	null	null
1	35	null	null
1	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
1	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
1	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
1	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
1	40	null	null
1	41	null	null
1	42	null	null
1	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
1	44	null	null
1	45	null	null
1	46	null	null
1	47	null	null
1	48	null	null
1	49	null	null
1	50	null	null
1	51	null	null
1	52	null	null
1	53	null	null
1	54	null	null
1	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
2	3	null	null
2	4	null	null
2	5	null	null
2	6	null	null
2	7	null	null
2	8	null	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong
2	9	null	null
2	10	null	null
2	11	null	null
2	12	null	Hong Kong University of Science and Technology
2	13	null	Hong Kong University of Science and Technology
2	14	null	Hong Kong University of Science and Technology
2	15	null	null
2	16	null	School of Business, Sun Yat-Sen University, Guangzhou, China
2	17	null	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China
2	18	null	null
2	19	null	null
2	20	null	null
2	21	null	null
2	22	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
2	23	null	null
2	24	null	null
2	25	null	null
2	26	null	Motorola, Inc.
2	27	null	null
2	28	null	null
2	29	null	null
2	30	null	null
2	31	null	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
2	32	null	null
2	33	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
2	34	null	null
2	35	null	null
2	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
2	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
2	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
2	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
2	40	null	null
2	41	null	null
2	42	null	null
2	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
2	44	null	null
2	45	null	null
2	46	null	null
2	47	null	null
2	48	null	null
2	49	null	null
2	50	null	null
2	51	null	null
2	52	null	null
2	53	null	null
2	54	null	null
2	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
3	4	null	null
3	5	null	null
3	6	null	null
3	7	null	null
3	8	null	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong
3	9	null	null
3	10	null	null
3	11	null	null
3	12	null	Hong Kong University of Science and Technology
3	13	null	Hong Kong University of Science and Technology
3	14	null	Hong Kong University of Science and Technology
3	15	null	null
3	16	null	School of Business, Sun Yat-Sen University, Guangzhou, China
3	17	null	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China
3	18	null	null
3	19	null	null
3	20	null	null
3	21	null	null
3	22	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
3	23	null	null
3	24	null	null
3	25	null	null
3	26	null	Motorola, Inc.
3	27	null	null
3	28	null	null
3	29	null	null
3	30	null	null
3	31	null	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
3	32	null	null
3	33	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
3	34	null	null
3	35	null	null
3	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
3	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
3	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
3	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
3	40	null	null
3	41	null	null
3	42	null	null
3	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
3	44	null	null
3	45	null	null
3	46	null	null
3	47	null	null
3	48	null	null
3	49	null	null
3	50	null	null
3	51	null	null
3	52	null	null
3	53	null	null
3	54	null	null
3	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
4	5	null	null
4	6	null	null
4	7	null	null
4	8	null	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong
4	9	null	null
4	10	null	null
4	11	null	null
4	12	null	Hong Kong University of Science and Technology
4	13	null	Hong Kong University of Science and Technology
4	14	null	Hong Kong University of Science and Technology
4	15	null	null
4	16	null	School of Business, Sun Yat-Sen University, Guangzhou, China
4	17	null	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China
4	18	null	null
4	19	null	null
4	20	null	null
4	21	null	null
4	22	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
4	23	null	null
4	24	null	null
4	25	null	null
4	26	null	Motorola, Inc.
4	27	null	null
4	28	null	null
4	29	null	null
4	30	null	null
4	31	null	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
4	32	null	null
4	33	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
4	34	null	null
4	35	null	null
4	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
4	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
4	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
4	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
4	40	null	null
4	41	null	null
4	42	null	null
4	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
4	44	null	null
4	45	null	null
4	46	null	null
4	47	null	null
4	48	null	null
4	49	null	null
4	50	null	null
4	51	null	null
4	52	null	null
4	53	null	null
4	54	null	null
4	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
5	6	null	null
5	7	null	null
5	8	null	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong
5	9	null	null
5	10	null	null
5	11	null	null
5	12	null	Hong Kong University of Science and Technology
5	13	null	Hong Kong University of Science and Technology
5	14	null	Hong Kong University of Science and Technology
5	15	null	null
5	16	null	School of Business, Sun Yat-Sen University, Guangzhou, China
5	17	null	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China
5	18	null	null
5	19	null	null
5	20	null	null
5	21	null	null
5	22	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
5	23	null	null
5	24	null	null
5	25	null	null
5	26	null	Motorola, Inc.
5	27	null	null
5	28	null	null
5	29	null	null
5	30	null	null
5	31	null	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
5	32	null	null
5	33	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
5	34	null	null
5	35	null	null
5	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
5	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
5	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
5	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
5	40	null	null
5	41	null	null
5	42	null	null
5	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
5	44	null	null
5	45	null	null
5	46	null	null
5	47	null	null
5	48	null	null
5	49	null	null
5	50	null	null
5	51	null	null
5	52	null	null
5	53	null	null
5	54	null	null
5	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
6	7	null	null
6	8	null	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong
6	9	null	null
6	10	null	null
6	11	null	null
6	12	null	Hong Kong University of Science and Technology
6	13	null	Hong Kong University of Science and Technology
6	14	null	Hong Kong University of Science and Technology
6	15	null	null
6	16	null	School of Business, Sun Yat-Sen University, Guangzhou, China
6	17	null	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China
6	18	null	null
6	19	null	null
6	20	null	null
6	21	null	null
6	22	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
6	23	null	null
6	24	null	null
6	25	null	null
6	26	null	Motorola, Inc.
6	27	null	null
6	28	null	null
6	29	null	null
6	30	null	null
6	31	null	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
6	32	null	null
6	33	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
6	34	null	null
6	35	null	null
6	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
6	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
6	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
6	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
6	40	null	null
6	41	null	null
6	42	null	null
6	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
6	44	null	null
6	45	null	null
6	46	null	null
6	47	null	null
6	48	null	null
6	49	null	null
6	50	null	null
6	51	null	null
6	52	null	null
6	53	null	null
6	54	null	null
6	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
7	8	null	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong
7	9	null	null
7	10	null	null
7	11	null	null
7	12	null	Hong Kong University of Science and Technology
7	13	null	Hong Kong University of Science and Technology
7	14	null	Hong Kong University of Science and Technology
7	15	null	null
7	16	null	School of Business, Sun Yat-Sen University, Guangzhou, China
7	17	null	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China
7	18	null	null
7	19	null	null
7	20	null	null
7	21	null	null
7	22	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
7	23	null	null
7	24	null	null
7	25	null	null
7	26	null	Motorola, Inc.
7	27	null	null
7	28	null	null
7	29	null	null
7	30	null	null
7	31	null	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
7	32	null	null
7	33	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
7	34	null	null
7	35	null	null
7	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
7	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
7	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
7	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
7	40	null	null
7	41	null	null
7	42	null	null
7	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
7	44	null	null
7	45	null	null
7	46	null	null
7	47	null	null
7	48	null	null
7	49	null	null
7	50	null	null
7	51	null	null
7	52	null	null
7	53	null	null
7	54	null	null
7	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
8	9	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	10	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	11	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	12	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	Hong Kong University of Science and Technology
8	13	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	Hong Kong University of Science and Technology
8	14	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	Hong Kong University of Science and Technology
8	15	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	16	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	School of Business, Sun Yat-Sen University, Guangzhou, China
8	17	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China
8	18	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	19	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	20	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	21	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	22	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
8	23	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	24	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	25	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	26	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	Motorola, Inc.
8	27	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	28	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	29	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	30	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	31	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
8	32	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	33	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
8	34	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	35	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	36	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
8	37	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
8	38	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
8	39	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
8	40	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	41	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	42	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	43	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
8	44	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	45	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	46	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	47	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	48	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	49	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	50	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	51	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	52	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	53	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	54	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	null
8	55	The Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
9	10	null	null
9	11	null	null
9	12	null	Hong Kong University of Science and Technology
9	13	null	Hong Kong University of Science and Technology
9	14	null	Hong Kong University of Science and Technology
9	15	null	null
9	16	null	School of Business, Sun Yat-Sen University, Guangzhou, China
9	17	null	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China
9	18	null	null
9	19	null	null
9	20	null	null
9	21	null	null
9	22	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
9	23	null	null
9	24	null	null
9	25	null	null
9	26	null	Motorola, Inc.
9	27	null	null
9	28	null	null
9	29	null	null
9	30	null	null
9	31	null	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
9	32	null	null
9	33	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
9	34	null	null
9	35	null	null
9	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
9	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
9	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
9	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
9	40	null	null
9	41	null	null
9	42	null	null
9	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
9	44	null	null
9	45	null	null
9	46	null	null
9	47	null	null
9	48	null	null
9	49	null	null
9	50	null	null
9	51	null	null
9	52	null	null
9	53	null	null
9	54	null	null
9	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
10	11	null	null
10	12	null	Hong Kong University of Science and Technology
10	13	null	Hong Kong University of Science and Technology
10	14	null	Hong Kong University of Science and Technology
10	15	null	null
10	16	null	School of Business, Sun Yat-Sen University, Guangzhou, China
10	17	null	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China
10	18	null	null
10	19	null	null
10	20	null	null
10	21	null	null
10	22	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
10	23	null	null
10	24	null	null
10	25	null	null
10	26	null	Motorola, Inc.
10	27	null	null
10	28	null	null
10	29	null	null
10	30	null	null
10	31	null	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
10	32	null	null
10	33	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
10	34	null	null
10	35	null	null
10	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
10	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
10	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
10	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
10	40	null	null
10	41	null	null
10	42	null	null
10	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
10	44	null	null
10	45	null	null
10	46	null	null
10	47	null	null
10	48	null	null
10	49	null	null
10	50	null	null
10	51	null	null
10	52	null	null
10	53	null	null
10	54	null	null
10	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
11	12	null	Hong Kong University of Science and Technology
11	13	null	Hong Kong University of Science and Technology
11	14	null	Hong Kong University of Science and Technology
11	15	null	null
11	16	null	School of Business, Sun Yat-Sen University, Guangzhou, China
11	17	null	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China
11	18	null	null
11	19	null	null
11	20	null	null
11	21	null	null
11	22	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
11	23	null	null
11	24	null	null
11	25	null	null
11	26	null	Motorola, Inc.
11	27	null	null
11	28	null	null
11	29	null	null
11	30	null	null
11	31	null	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
11	32	null	null
11	33	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
11	34	null	null
11	35	null	null
11	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
11	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
11	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
11	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
11	40	null	null
11	41	null	null
11	42	null	null
11	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
11	44	null	null
11	45	null	null
11	46	null	null
11	47	null	null
11	48	null	null
11	49	null	null
11	50	null	null
11	51	null	null
11	52	null	null
11	53	null	null
11	54	null	null
11	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
12	13	Hong Kong University of Science and Technology	Hong Kong University of Science and Technology
12	14	Hong Kong University of Science and Technology	Hong Kong University of Science and Technology
12	15	Hong Kong University of Science and Technology	null
12	16	Hong Kong University of Science and Technology	School of Business, Sun Yat-Sen University, Guangzhou, China
12	17	Hong Kong University of Science and Technology	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China
12	18	Hong Kong University of Science and Technology	null
12	19	Hong Kong University of Science and Technology	null
12	20	Hong Kong University of Science and Technology	null
12	21	Hong Kong University of Science and Technology	null
12	22	Hong Kong University of Science and Technology	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
12	23	Hong Kong University of Science and Technology	null
12	24	Hong Kong University of Science and Technology	null
12	25	Hong Kong University of Science and Technology	null
12	26	Hong Kong University of Science and Technology	Motorola, Inc.
12	27	Hong Kong University of Science and Technology	null
12	28	Hong Kong University of Science and Technology	null
12	29	Hong Kong University of Science and Technology	null
12	30	Hong Kong University of Science and Technology	null
12	31	Hong Kong University of Science and Technology	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
12	32	Hong Kong University of Science and Technology	null
12	33	Hong Kong University of Science and Technology	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
12	34	Hong Kong University of Science and Technology	null
12	35	Hong Kong University of Science and Technology	null
12	36	Hong Kong University of Science and Technology	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
12	37	Hong Kong University of Science and Technology	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
12	38	Hong Kong University of Science and Technology	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
12	39	Hong Kong University of Science and Technology	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
12	40	Hong Kong University of Science and Technology	null
12	41	Hong Kong University of Science and Technology	null
12	42	Hong Kong University of Science and Technology	null
12	43	Hong Kong University of Science and Technology	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
12	44	Hong Kong University of Science and Technology	null
12	45	Hong Kong University of Science and Technology	null
12	46	Hong Kong University of Science and Technology	null
12	47	Hong Kong University of Science and Technology	null
12	48	Hong Kong University of Science and Technology	null
12	49	Hong Kong University of Science and Technology	null
12	50	Hong Kong University of Science and Technology	null
12	51	Hong Kong University of Science and Technology	null
12	52	Hong Kong University of Science and Technology	null
12	53	Hong Kong University of Science and Technology	null
12	54	Hong Kong University of Science and Technology	null
12	55	Hong Kong University of Science and Technology	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
13	14	Hong Kong University of Science and Technology	Hong Kong University of Science and Technology
13	15	Hong Kong University of Science and Technology	null
13	16	Hong Kong University of Science and Technology	School of Business, Sun Yat-Sen University, Guangzhou, China
13	17	Hong Kong University of Science and Technology	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China
13	18	Hong Kong University of Science and Technology	null
13	19	Hong Kong University of Science and Technology	null
13	20	Hong Kong University of Science and Technology	null
13	21	Hong Kong University of Science and Technology	null
13	22	Hong Kong University of Science and Technology	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
13	23	Hong Kong University of Science and Technology	null
13	24	Hong Kong University of Science and Technology	null
13	25	Hong Kong University of Science and Technology	null
13	26	Hong Kong University of Science and Technology	Motorola, Inc.
13	27	Hong Kong University of Science and Technology	null
13	28	Hong Kong University of Science and Technology	null
13	29	Hong Kong University of Science and Technology	null
13	30	Hong Kong University of Science and Technology	null
13	31	Hong Kong University of Science and Technology	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
13	32	Hong Kong University of Science and Technology	null
13	33	Hong Kong University of Science and Technology	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
13	34	Hong Kong University of Science and Technology	null
13	35	Hong Kong University of Science and Technology	null
13	36	Hong Kong University of Science and Technology	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
13	37	Hong Kong University of Science and Technology	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
13	38	Hong Kong University of Science and Technology	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
13	39	Hong Kong University of Science and Technology	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
13	40	Hong Kong University of Science and Technology	null
13	41	Hong Kong University of Science and Technology	null
13	42	Hong Kong University of Science and Technology	null
13	43	Hong Kong University of Science and Technology	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
13	44	Hong Kong University of Science and Technology	null
13	45	Hong Kong University of Science and Technology	null
13	46	Hong Kong University of Science and Technology	null
13	47	Hong Kong University of Science and Technology	null
13	48	Hong Kong University of Science and Technology	null
13	49	Hong Kong University of Science and Technology	null
13	50	Hong Kong University of Science and Technology	null
13	51	Hong Kong University of Science and Technology	null
13	52	Hong Kong University of Science and Technology	null
13	53	Hong Kong University of Science and Technology	null
13	54	Hong Kong University of Science and Technology	null
13	55	Hong Kong University of Science and Technology	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
14	15	Hong Kong University of Science and Technology	null
14	16	Hong Kong University of Science and Technology	School of Business, Sun Yat-Sen University, Guangzhou, China
14	17	Hong Kong University of Science and Technology	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China
14	18	Hong Kong University of Science and Technology	null
14	19	Hong Kong University of Science and Technology	null
14	20	Hong Kong University of Science and Technology	null
14	21	Hong Kong University of Science and Technology	null
14	22	Hong Kong University of Science and Technology	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
14	23	Hong Kong University of Science and Technology	null
14	24	Hong Kong University of Science and Technology	null
14	25	Hong Kong University of Science and Technology	null
14	26	Hong Kong University of Science and Technology	Motorola, Inc.
14	27	Hong Kong University of Science and Technology	null
14	28	Hong Kong University of Science and Technology	null
14	29	Hong Kong University of Science and Technology	null
14	30	Hong Kong University of Science and Technology	null
14	31	Hong Kong University of Science and Technology	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
14	32	Hong Kong University of Science and Technology	null
14	33	Hong Kong University of Science and Technology	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
14	34	Hong Kong University of Science and Technology	null
14	35	Hong Kong University of Science and Technology	null
14	36	Hong Kong University of Science and Technology	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
14	37	Hong Kong University of Science and Technology	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
14	38	Hong Kong University of Science and Technology	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
14	39	Hong Kong University of Science and Technology	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
14	40	Hong Kong University of Science and Technology	null
14	41	Hong Kong University of Science and Technology	null
14	42	Hong Kong University of Science and Technology	null
14	43	Hong Kong University of Science and Technology	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
14	44	Hong Kong University of Science and Technology	null
14	45	Hong Kong University of Science and Technology	null
14	46	Hong Kong University of Science and Technology	null
14	47	Hong Kong University of Science and Technology	null
14	48	Hong Kong University of Science and Technology	null
14	49	Hong Kong University of Science and Technology	null
14	50	Hong Kong University of Science and Technology	null
14	51	Hong Kong University of Science and Technology	null
14	52	Hong Kong University of Science and Technology	null
14	53	Hong Kong University of Science and Technology	null
14	54	Hong Kong University of Science and Technology	null
14	55	Hong Kong University of Science and Technology	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
15	16	null	School of Business, Sun Yat-Sen University, Guangzhou, China
15	17	null	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China
15	18	null	null
15	19	null	null
15	20	null	null
15	21	null	null
15	22	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
15	23	null	null
15	24	null	null
15	25	null	null
15	26	null	Motorola, Inc.
15	27	null	null
15	28	null	null
15	29	null	null
15	30	null	null
15	31	null	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
15	32	null	null
15	33	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
15	34	null	null
15	35	null	null
15	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
15	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
15	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
15	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
15	40	null	null
15	41	null	null
15	42	null	null
15	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
15	44	null	null
15	45	null	null
15	46	null	null
15	47	null	null
15	48	null	null
15	49	null	null
15	50	null	null
15	51	null	null
15	52	null	null
15	53	null	null
15	54	null	null
15	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
16	17	School of Business, Sun Yat-Sen University, Guangzhou, China	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China
16	18	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	19	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	20	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	21	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	22	School of Business, Sun Yat-Sen University, Guangzhou, China	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
16	23	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	24	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	25	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	26	School of Business, Sun Yat-Sen University, Guangzhou, China	Motorola, Inc.
16	27	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	28	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	29	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	30	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	31	School of Business, Sun Yat-Sen University, Guangzhou, China	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
16	32	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	33	School of Business, Sun Yat-Sen University, Guangzhou, China	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
16	34	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	35	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	36	School of Business, Sun Yat-Sen University, Guangzhou, China	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
16	37	School of Business, Sun Yat-Sen University, Guangzhou, China	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
16	38	School of Business, Sun Yat-Sen University, Guangzhou, China	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
16	39	School of Business, Sun Yat-Sen University, Guangzhou, China	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
16	40	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	41	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	42	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	43	School of Business, Sun Yat-Sen University, Guangzhou, China	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
16	44	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	45	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	46	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	47	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	48	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	49	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	50	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	51	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	52	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	53	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	54	School of Business, Sun Yat-Sen University, Guangzhou, China	null
16	55	School of Business, Sun Yat-Sen University, Guangzhou, China	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
17	18	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	19	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	20	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	21	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	22	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
17	23	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	24	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	25	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	26	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	Motorola, Inc.
17	27	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	28	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	29	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	30	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	31	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
17	32	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	33	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
17	34	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	35	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	36	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
17	37	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
17	38	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
17	39	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
17	40	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	41	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	42	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	43	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
17	44	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	45	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	46	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	47	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	48	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	49	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	50	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	51	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	52	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	53	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	54	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	null
17	55	School of Business, Sun Yat-Sen University, Guangzhou, P.R. China	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
18	19	null	null
18	20	null	null
18	21	null	null
18	22	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
18	23	null	null
18	24	null	null
18	25	null	null
18	26	null	Motorola, Inc.
18	27	null	null
18	28	null	null
18	29	null	null
18	30	null	null
18	31	null	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
18	32	null	null
18	33	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
18	34	null	null
18	35	null	null
18	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
18	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
18	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
18	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
18	40	null	null
18	41	null	null
18	42	null	null
18	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
18	44	null	null
18	45	null	null
18	46	null	null
18	47	null	null
18	48	null	null
18	49	null	null
18	50	null	null
18	51	null	null
18	52	null	null
18	53	null	null
18	54	null	null
18	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
19	20	null	null
19	21	null	null
19	22	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
19	23	null	null
19	24	null	null
19	25	null	null
19	26	null	Motorola, Inc.
19	27	null	null
19	28	null	null
19	29	null	null
19	30	null	null
19	31	null	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
19	32	null	null
19	33	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
19	34	null	null
19	35	null	null
19	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
19	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
19	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
19	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
19	40	null	null
19	41	null	null
19	42	null	null
19	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
19	44	null	null
19	45	null	null
19	46	null	null
19	47	null	null
19	48	null	null
19	49	null	null
19	50	null	null
19	51	null	null
19	52	null	null
19	53	null	null
19	54	null	null
19	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
20	21	null	null
20	22	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
20	23	null	null
20	24	null	null
20	25	null	null
20	26	null	Motorola, Inc.
20	27	null	null
20	28	null	null
20	29	null	null
20	30	null	null
20	31	null	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
20	32	null	null
20	33	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
20	34	null	null
20	35	null	null
20	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
20	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
20	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
20	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
20	40	null	null
20	41	null	null
20	42	null	null
20	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
20	44	null	null
20	45	null	null
20	46	null	null
20	47	null	null
20	48	null	null
20	49	null	null
20	50	null	null
20	51	null	null
20	52	null	null
20	53	null	null
20	54	null	null
20	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
21	22	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
21	23	null	null
21	24	null	null
21	25	null	null
21	26	null	Motorola, Inc.
21	27	null	null
21	28	null	null
21	29	null	null
21	30	null	null
21	31	null	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
21	32	null	null
21	33	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
21	34	null	null
21	35	null	null
21	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
21	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
21	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
21	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
21	40	null	null
21	41	null	null
21	42	null	null
21	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
21	44	null	null
21	45	null	null
21	46	null	null
21	47	null	null
21	48	null	null
21	49	null	null
21	50	null	null
21	51	null	null
21	52	null	null
21	53	null	null
21	54	null	null
21	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
22	23	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
22	24	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
22	25	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
22	26	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	Motorola, Inc.
22	27	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
22	28	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
22	29	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
22	30	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
22	31	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
22	32	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
22	33	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
22	34	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
22	35	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
22	36	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
22	37	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
22	38	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
22	39	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
22	40	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
22	41	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
22	42	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
22	43	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
22	44	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
22	45	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
22	46	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
22	47	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
22	48	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
22	49	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
22	50	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
22	51	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
22	52	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
22	53	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
22	54	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
22	55	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
23	24	null	null
23	25	null	null
23	26	null	Motorola, Inc.
23	27	null	null
23	28	null	null
23	29	null	null
23	30	null	null
23	31	null	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
23	32	null	null
23	33	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
23	34	null	null
23	35	null	null
23	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
23	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
23	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
23	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
23	40	null	null
23	41	null	null
23	42	null	null
23	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
23	44	null	null
23	45	null	null
23	46	null	null
23	47	null	null
23	48	null	null
23	49	null	null
23	50	null	null
23	51	null	null
23	52	null	null
23	53	null	null
23	54	null	null
23	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
24	25	null	null
24	26	null	Motorola, Inc.
24	27	null	null
24	28	null	null
24	29	null	null
24	30	null	null
24	31	null	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
24	32	null	null
24	33	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
24	34	null	null
24	35	null	null
24	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
24	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
24	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
24	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
24	40	null	null
24	41	null	null
24	42	null	null
24	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
24	44	null	null
24	45	null	null
24	46	null	null
24	47	null	null
24	48	null	null
24	49	null	null
24	50	null	null
24	51	null	null
24	52	null	null
24	53	null	null
24	54	null	null
24	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
25	26	null	Motorola, Inc.
25	27	null	null
25	28	null	null
25	29	null	null
25	30	null	null
25	31	null	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
25	32	null	null
25	33	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
25	34	null	null
25	35	null	null
25	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
25	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
25	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
25	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
25	40	null	null
25	41	null	null
25	42	null	null
25	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
25	44	null	null
25	45	null	null
25	46	null	null
25	47	null	null
25	48	null	null
25	49	null	null
25	50	null	null
25	51	null	null
25	52	null	null
25	53	null	null
25	54	null	null
25	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
26	27	Motorola, Inc.	null
26	28	Motorola, Inc.	null
26	29	Motorola, Inc.	null
26	30	Motorola, Inc.	null
26	31	Motorola, Inc.	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
26	32	Motorola, Inc.	null
26	33	Motorola, Inc.	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
26	34	Motorola, Inc.	null
26	35	Motorola, Inc.	null
26	36	Motorola, Inc.	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
26	37	Motorola, Inc.	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
26	38	Motorola, Inc.	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
26	39	Motorola, Inc.	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
26	40	Motorola, Inc.	null
26	41	Motorola, Inc.	null
26	42	Motorola, Inc.	null
26	43	Motorola, Inc.	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
26	44	Motorola, Inc.	null
26	45	Motorola, Inc.	null
26	46	Motorola, Inc.	null
26	47	Motorola, Inc.	null
26	48	Motorola, Inc.	null
26	49	Motorola, Inc.	null
26	50	Motorola, Inc.	null
26	51	Motorola, Inc.	null
26	52	Motorola, Inc.	null
26	53	Motorola, Inc.	null
26	54	Motorola, Inc.	null
26	55	Motorola, Inc.	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
27	28	null	null
27	29	null	null
27	30	null	null
27	31	null	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
27	32	null	null
27	33	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
27	34	null	null
27	35	null	null
27	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
27	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
27	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
27	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
27	40	null	null
27	41	null	null
27	42	null	null
27	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
27	44	null	null
27	45	null	null
27	46	null	null
27	47	null	null
27	48	null	null
27	49	null	null
27	50	null	null
27	51	null	null
27	52	null	null
27	53	null	null
27	54	null	null
27	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
28	29	null	null
28	30	null	null
28	31	null	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
28	32	null	null
28	33	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
28	34	null	null
28	35	null	null
28	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
28	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
28	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
28	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
28	40	null	null
28	41	null	null
28	42	null	null
28	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
28	44	null	null
28	45	null	null
28	46	null	null
28	47	null	null
28	48	null	null
28	49	null	null
28	50	null	null
28	51	null	null
28	52	null	null
28	53	null	null
28	54	null	null
28	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
29	30	null	null
29	31	null	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
29	32	null	null
29	33	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
29	34	null	null
29	35	null	null
29	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
29	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
29	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
29	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
29	40	null	null
29	41	null	null
29	42	null	null
29	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
29	44	null	null
29	45	null	null
29	46	null	null
29	47	null	null
29	48	null	null
29	49	null	null
29	50	null	null
29	51	null	null
29	52	null	null
29	53	null	null
29	54	null	null
29	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
30	31	null	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States
30	32	null	null
30	33	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
30	34	null	null
30	35	null	null
30	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
30	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
30	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
30	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
30	40	null	null
30	41	null	null
30	42	null	null
30	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
30	44	null	null
30	45	null	null
30	46	null	null
30	47	null	null
30	48	null	null
30	49	null	null
30	50	null	null
30	51	null	null
30	52	null	null
30	53	null	null
30	54	null	null
30	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
31	32	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States	null
31	33	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
31	34	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States	null
31	35	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States	null
31	36	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
31	37	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
31	38	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
31	39	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
31	40	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States	null
31	41	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States	null
31	42	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States	null
31	43	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
31	44	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States	null
31	45	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States	null
31	46	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States	null
31	47	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States	null
31	48	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States	null
31	49	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States	null
31	50	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States	null
31	51	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States	null
31	52	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States	null
31	53	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States	null
31	54	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States	null
31	55	Department of Electrical and Computer Engineering, University of Arizona, Tucson, AZ 85721, United States	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
32	33	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.
32	34	null	null
32	35	null	null
32	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
32	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
32	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
32	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
32	40	null	null
32	41	null	null
32	42	null	null
32	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
32	44	null	null
32	45	null	null
32	46	null	null
32	47	null	null
32	48	null	null
32	49	null	null
32	50	null	null
32	51	null	null
32	52	null	null
32	53	null	null
32	54	null	null
32	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
33	34	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.	null
33	35	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.	null
33	36	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
33	37	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
33	38	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
33	39	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
33	40	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.	null
33	41	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.	null
33	42	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.	null
33	43	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
33	44	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.	null
33	45	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.	null
33	46	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.	null
33	47	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.	null
33	48	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.	null
33	49	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.	null
33	50	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.	null
33	51	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.	null
33	52	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.	null
33	53	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.	null
33	54	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.	null
33	55	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong.	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
34	35	null	null
34	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
34	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
34	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
34	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
34	40	null	null
34	41	null	null
34	42	null	null
34	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
34	44	null	null
34	45	null	null
34	46	null	null
34	47	null	null
34	48	null	null
34	49	null	null
34	50	null	null
34	51	null	null
34	52	null	null
34	53	null	null
34	54	null	null
34	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
35	36	null	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China
35	37	null	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
35	38	null	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
35	39	null	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
35	40	null	null
35	41	null	null
35	42	null	null
35	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
35	44	null	null
35	45	null	null
35	46	null	null
35	47	null	null
35	48	null	null
35	49	null	null
35	50	null	null
35	51	null	null
35	52	null	null
35	53	null	null
35	54	null	null
35	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
36	37	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
36	38	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
36	39	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
36	40	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China	null
36	41	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China	null
36	42	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China	null
36	43	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
36	44	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China	null
36	45	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China	null
36	46	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China	null
36	47	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China	null
36	48	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China	null
36	49	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China	null
36	50	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China	null
36	51	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China	null
36	52	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China	null
36	53	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China	null
36	54	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China	null
36	55	School of Business, Sun Yat-Sen University, Guangzhou, People's Republic of China	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
37	38	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	Department of Computer Science and Engineering, Ohio State University, Columbus 43210
37	39	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
37	40	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	null
37	41	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	null
37	42	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	null
37	43	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
37	44	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	null
37	45	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	null
37	46	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	null
37	47	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	null
37	48	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	null
37	49	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	null
37	50	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	null
37	51	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	null
37	52	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	null
37	53	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	null
37	54	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	null
37	55	Department of Industrial Engineering and Engineering Management, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
38	39	Department of Computer Science and Engineering, Ohio State University, Columbus 43210	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210
38	40	Department of Computer Science and Engineering, Ohio State University, Columbus 43210	null
38	41	Department of Computer Science and Engineering, Ohio State University, Columbus 43210	null
38	42	Department of Computer Science and Engineering, Ohio State University, Columbus 43210	null
38	43	Department of Computer Science and Engineering, Ohio State University, Columbus 43210	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
38	44	Department of Computer Science and Engineering, Ohio State University, Columbus 43210	null
38	45	Department of Computer Science and Engineering, Ohio State University, Columbus 43210	null
38	46	Department of Computer Science and Engineering, Ohio State University, Columbus 43210	null
38	47	Department of Computer Science and Engineering, Ohio State University, Columbus 43210	null
38	48	Department of Computer Science and Engineering, Ohio State University, Columbus 43210	null
38	49	Department of Computer Science and Engineering, Ohio State University, Columbus 43210	null
38	50	Department of Computer Science and Engineering, Ohio State University, Columbus 43210	null
38	51	Department of Computer Science and Engineering, Ohio State University, Columbus 43210	null
38	52	Department of Computer Science and Engineering, Ohio State University, Columbus 43210	null
38	53	Department of Computer Science and Engineering, Ohio State University, Columbus 43210	null
38	54	Department of Computer Science and Engineering, Ohio State University, Columbus 43210	null
38	55	Department of Computer Science and Engineering, Ohio State University, Columbus 43210	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
39	40	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
39	41	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
39	42	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
39	43	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
39	44	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
39	45	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
39	46	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
39	47	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
39	48	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
39	49	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
39	50	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
39	51	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
39	52	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
39	53	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
39	54	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	null
39	55	Department of Computer Science and Engineering, Ohio State University, Columbus OH 43210	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
40	41	null	null
40	42	null	null
40	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
40	44	null	null
40	45	null	null
40	46	null	null
40	47	null	null
40	48	null	null
40	49	null	null
40	50	null	null
40	51	null	null
40	52	null	null
40	53	null	null
40	54	null	null
40	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
41	42	null	null
41	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
41	44	null	null
41	45	null	null
41	46	null	null
41	47	null	null
41	48	null	null
41	49	null	null
41	50	null	null
41	51	null	null
41	52	null	null
41	53	null	null
41	54	null	null
41	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
42	43	null	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong
42	44	null	null
42	45	null	null
42	46	null	null
42	47	null	null
42	48	null	null
42	49	null	null
42	50	null	null
42	51	null	null
42	52	null	null
42	53	null	null
42	54	null	null
42	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
43	44	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	null
43	45	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	null
43	46	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	null
43	47	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	null
43	48	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	null
43	49	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	null
43	50	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	null
43	51	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	null
43	52	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	null
43	53	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	null
43	54	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	null
43	55	Department of Industrial Engineering and Engineering Management, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
44	45	null	null
44	46	null	null
44	47	null	null
44	48	null	null
44	49	null	null
44	50	null	null
44	51	null	null
44	52	null	null
44	53	null	null
44	54	null	null
44	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
45	46	null	null
45	47	null	null
45	48	null	null
45	49	null	null
45	50	null	null
45	51	null	null
45	52	null	null
45	53	null	null
45	54	null	null
45	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
46	47	null	null
46	48	null	null
46	49	null	null
46	50	null	null
46	51	null	null
46	52	null	null
46	53	null	null
46	54	null	null
46	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
47	48	null	null
47	49	null	null
47	50	null	null
47	51	null	null
47	52	null	null
47	53	null	null
47	54	null	null
47	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
48	49	null	null
48	50	null	null
48	51	null	null
48	52	null	null
48	53	null	null
48	54	null	null
48	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
49	50	null	null
49	51	null	null
49	52	null	null
49	53	null	null
49	54	null	null
49	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
50	51	null	null
50	52	null	null
50	53	null	null
50	54	null	null
50	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
51	52	null	null
51	53	null	null
51	54	null	null
51	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
52	53	null	null
52	54	null	null
52	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
53	54	null	null
53	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
54	55	null	National Engineering Research Center for Lithographic Equipment, Shanghai 201203, China
